Integrateable Silicon NANOWIRE SENSOR Platform

Project Leader: Christian Schönenberger of UniBasel    +41 61 267 36 90

    Michel Calame of of UniBasel/Swiss Nanoscience Institute, expert in formation mechanisms and functionality in molecular junctions

    Beat Ernst of Uni Basel/Pharmaceutical Sciences/Molecular Pharmacy, expert in biological test beds for diagnosis and screening (protein sensing and glucose detection

    Jens Gobrecht of Paul Scherrer Institute/LMN, expert in silicon and solid state processing and technology

    Andreas Hierlemann of ETHZ/D-MAVT/MicroNano/DBSSE, expert in fabrication and modelling

    Adrian Ionescu of EPFL/STI/IEL/NANOLAB, expert in Nanowire GAA FET fabrication platform-local strain technology-abrupt switch concepts. concept-modelling and fabrication

    Uwe Pieles of FHNW/Nanotechnology, expert in Multifunctional nanoparticles. passivation chemical functionalization

    Janos Vörös of ETH Zurich/Inst. for Biomedical Engineering/Lab. of Biosensors and Bioelectronics, expert in biosensors-functionalization and characterization of plasmonic elements




There is nowadays a growing need for sensing devices offering rapid and portable analytical functionality in real-time as well as massively parallel capabilities with very high sensitivity at the molecular level. Such devices are essential to facilitate research and foster advances in fields such as drug discovery, proteomics, medical diagnostics, systems biology or environmental monitoring.

In this context, an ideal solution is an ion-sensitive field-effect transistor sensor platform based on silicon nanowires to be integrated in a CMOS architecture. Indeed, in addition to the expected high sensitivity and superior signal quality, such nanowire sensors could be mass manufactured at reasonable costs, and readily integrated into electronic diagnostic devices to facilitate bed-site diagnostics and personalized medicine.  Moreover, their small size makes them ideal candidates for future implanted sensing devices. While promising biosensing experiments based on silicon nanowire field-effect transistors have been reported, real-life applications still require improved control, together with a detailed understanding of the basic sensing mechanisms. For instance, it is crucial to optimize the geometry of the wire, a still rather unexplored aspect up to now, as well as its surface functionalization or its selectivity to the targeted analytes.

This project seeks to develop a modular, scalable and integrateable sensor platform for the electronic detection of analytes in solution.  The idea is to integrate silicon nanowire field-effect transistors as a sensor array and combine them with state-of-the-art microfabricated interface electronics as well as with microfluidic channels for liquid handling. Such sensors have the potential to be mass manufactured at reasonable costs, allowing their integration as the active sensor part in electronic point-of-care diagnostic devices to facilitate, for instance, bed-side diagnostics and personalized medicine. Another important field is systems biology, where many substances need to be quantitatively detected in parallel at very low concentrations: in these situations, the platform being developed fulfills the requirements ideally and will have a strong impact and provide new insights, e.g. into the metabolic processes of cells, organisms or organs.


posters from 2011


Advanced Nanowire Array System for Optical and Electrical Biosensing
Bernd Dielacher, Robert Neil MacKenzie, Birgit Päivänranta, Andreas Langner, Janos Vörös

CMOS Integrated Readout for Silicon Nanowire-based biosensors
Paolo Livi, Jörg Rothe, Yihui Chen, Andreas Hierlemann

Fabrication of Nanowire FET Arrays
Kristine Bedner, Birgit Päivänranta, Vitaliy Guzenko, Christian David, Jens Gobrecht

Functionalization of SiNWs for biosensing applications
Jolanta Kurz, Uwe Pieles, Christian Schoenenberger

Process development of Au nanowire arrays for biosensing applications
Birgit Päivänranta, Vitaliy Guzenko, Kristine Bedner, Christian David, Jens Gobrecht

Sensing with dual-gated Si nanowire FETs
Wangyang Fu, Oren Knopfmacher, Alexey Tarasov, Mathias Wipf, Michel Calame, Christian Schönenberger

Silicon Nanowires for a Sensing Platform
Sara Rigante, Adrian Ionescu

 

Notable Publications


Controlled In Situ Nanoscale Enhancement of Gold Nanowire Arrays with Plasmonics
R. MacKenzie, C. Fraschina, T. Sannomiya and J. Vörös,
Nanotechnology, (0, 2011)

FinFET for High Sensitivity Ion and Biological Sensing Applications
S. Rigante, L. Lattanzio and A. M. Ionescu,
Microelectronics Engineering, (0, 2011)

Graphene Transistors Are Insensitive to pH Changes inSolution.
W. Fu, C. Nef, O. Knopfmacher, A. Tarasov, M. Weiss, M. Calame, C. Schönenberger.
Nano Letters (0, 2011)

Signal-to-noise ratio in dual-gated silicon nanoribbon field-effect sensors
A. Tarasov, W. Fu, O. Knopfmacher, J. Brunner, M. Calame, and C. Schönenberger,
Appl. Phys. Lett. (0, 2011)

The potential of microelectrode arrays and microelectronics for biomedical research and diagnostics
I. L. Jones, P. Livi, M. K. Lewandowska, M. Fiscella, B. Roscic and A. Hierlemann,
Analytical and Bioanalytical Chemistry, (0, 2011)

Adaptive Microsensor Systems
R. Gutierrez-Osuna and A. Hierlemann,
Annu. Rev. Anal. Chem. (0, 2010)

Nernst Limit in Dual-Gated Si-Nanowire FET Sensors
O. Knopfmacher, A. Tarasov, W. Fu, M. Wipf, B. Niesen, M. Calame, C. Schönenberger,
Nano Letters (0, 2010)

Optical Sensing with Simultaneous Electrochemical Control in Metal Nanowire Arrays
R. MacKenzie, C. Fraschina, T. Sannomiya, V. Auzelyte and J. Vörös,
Sensors, (0, 2010)

Sensitivity considerations in dual-gated Si-nanowire FET sensors.
O. Knopfmacher, A. Tarasov, W. Fu, M. Calame, and C. Schönenberger,
European Cells and Materials, (0, 2010)

Silicon Nanowires as Biochemical Sensors
J. Kurz, U. Pieles, Ch. Schönenberger,
European Cells and Materials, (0, 2010)

Switch-matrix-based high-density microelectrode array in CMOS technology
U. Frey, J. Sedivy, F. Heer, R. Pedron, M. Ballini, J. Mueller, D. Bakkum, S. Hafizovic, F. D. Faraci, F. Greve, K.-U. Kirstein, and A. Hierlemann,
IEEE Journal of Solid-State Circuits, (0, 2010)

The Nernst limit in dual-gated Si nanowire FET sensors
O. Knopfmacher, A. Tarasov, Wangyang Fu, M. Wipf, B. Niesen, M. Calame, and C. Schönenberger,
Nano Letters (0, 2010)

The potential of microelectrode arrays and microelectronics for biomedical research and diagnostics
I. L. Jones, P. Livi, M. K. Lewandowska, M. Fiscella, B. Roscic and A. Hierlemann,
Analytical and Bioanalytical Chemistry, (0, 2010)

Microelectronic System for High-Resolution Mapping of Extracellular Electric Fields Applied to Brain Slices
U. Frey, U. Egert, F. Heer, S. Hafizovic, and A. Hierlemann,
Biosensors and Bioelectronics, (0, 2009)

Related Pages

NanoTeraWiki entry

Nano-Tera projects presentation.


mySNF Number

20NAN1_123611



Nano-Tera Ref

611_61

Staff Composition

7 Professors
5 Postdoctoral Fellows
8 PhD Students
6 Senior Scientists
2 Technicians
1 Engineer


2010 Video
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